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(Solved): Problem 4 ( 20 points). The schematic of an electrostatic actuator is shown below. It has a parall ...
Problem 4 ( 20 points). The schematic of an electrostatic actuator is shown below. It has a parallel plate capacitor suspended by two-fixed guided cantilever beams, each with length, width, and thickness denoted and . The length and width of the plate are and . The distance between the plate and the bottom gold electrode is , forming the driving capacitor. The area of the gold electrode is the same as the plate. There is a set of comb-finger capacitors on each side of the plate, which are used to sense the displacement of the plate (as the sensing capacitor). The initial overlap length of the fingers is . The gap between two fingers is . The values of the parameters are listed in the table. (Note: the fringe effect in the capacitors is neglected.) Please find:
Expert Answer
it seems that the actuator consists of a parallel plate capacitor suspended by two fixed guided cantilever beams. The dimensions and parameters of the various components are also provided.Here are the values of the given parameters:Length of each cantilever beam: l = 0.8 mmWidth of each cantilever beam: w = 3 ?mThickness of each cantilever beam: t = 4 ?mLength of the plate: lm = 0.4 mmWidth of the plate: wm = 0.4 mmDistance between the plate and the bottom gold electrode: d = 2 ?mInitial overlap length of the fingers of the sensing capacitor: loc = 10 ?mGap between two fingers of the sensing capacitor: xoc = 2 ?mElastic modulus of the material: E = 120 GPa