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(Solved): A thin film NMOS transistor with a back-gate (using underlying bulk Si as gate) is designed as shown ...



A thin film NMOS transistor with a back-gate (using underlying bulk Si as gate) is designed as shown in cross- section (left) and in top view (right). Design a process flowchart (including mask patterns and the photo resist tones) to fabricate this device. p-type poly-Si Al n+ ? n+ n-type Si SiO? =>

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A thin film NMOS transistor with a back-gate (using underlying bulk as gate) is designed as shown in crosssection (left) and in top view (right). Design a process flowchart (including mask patterns and the photo resist tones) to fabricate this device. p-type poly-Si


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