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[Solved]: 12. The left figure below shows a MEMS accelerome
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(Solved): 12. The left figure below shows a MEMS accelerometer comprising one mass and two springs. The mass ...


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12. The left figure below shows a MEMS accelerometer comprising one mass and two springs. The mass displacement is measured with a capacitive displacement sensor, whose output is . This sensor can be modeled as two series capacitors as shown in the right figure. Derive from first principles (i.e from scratch) an expression for the acceleration in terms of , and .


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